| Overview | NanoGrid | NanoScale | NanoGauge | Stabilized Laser Diode @ 1323 nm |

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Features:

  • 156nm up to 0.305nm resolution
  • High repeatability
  • Nanometer resolution
  • Low interpolation error
  • High speeds, Max.Velocity 1.5m/sec

NanoScale is a laser diode-based linear incremental encoder that can measure position relative to a scale with laser interferometer-level resolution and repeatability.  However, the NanoScale suffers from none of the instability problems; such as drift, sensitivity to air turbulence, and length of optical path; that are normally associated with lasers.  With its compact size, the NanoScale can be easily retrofitted to existing stages and mechanics for the ultimate upgrade in positioning performance.

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Download Spec Sheet: NanoScale A ( 20nm up to 0.305nm resolution)

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The NanoScale A Hi-Resolution System features the coupling of the NanoScale linear position sensor with OPTRA¡¯s Hi Resolution phase processor and signal interpolation board.  This ISA bus-based processor features fast on-board processing of the encoder position signals.  A single processor board can operate two sensor heads.  Position information is available on both the bus interface for easy software access, or via two 60-pin headers for direct, high speed data reads at .305nm resolution.  The position data is available in a standard 32-bit parallel word format.  An optional daughter board is available for signal conversion to an A-quad-B digital signal format.

A NanoScale system captures the accuracy of the laser interferometer in the manufacturing the scale. The sensor head then collects first-order diffracted light reflected from the scale. Our patented detector measures the interference pattern, and results in an extremely stable, balanced signal with a interpolation error of less then 10 nanometers. (See Theory of NanoGrid Operation-will open in Adobe Acrobat)

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Download Spec Sheet: NanoScale B ( 156nm up to 20nm resolution)


The NanoScale B Standard Resolution System features the coupling of the NanoScale linear position sensor with OPTRA¡¯s PolarFlash signal processor module.  The ASIC-based processor module features fast dual-axis processing of the encoder position signals.  A single module can operate two sensor heads.  Position information is in the form of an industry standard A-quad-B digital signal.  The edge rate and resolution are selectable, ranging from 1.25 to 10 MHz and from 20 to 156nm, respectively. 

A NanoScale system captures the accuracy of the laser interferometer in the manufacturing the scale. The sensor head then collects first-order diffracted light reflected from the scale. Our patented detector measures the interference pattern, and results in an extremely stable, balanced signal with a interpolation error of less then 10 nanometers. (See Theory of NanoGrid Operation-will open in Adobe Acrobat)

 

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