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Advantages:
- Two
Model : NanoGrid A(20~0.305nm
resolution) NanoGrid B(156~20nm
resolution)
- High
accuracy & reduced Abbe errors
- Resolution
and Repeatability at the nanometer level
- Easy
installation
- Large
Stand-off
- Two
type model
Features:
- 150~0.305nm
resolution.
- Insensitive
to drift, air turbulence unlike a laser interferometer.
- Planar
2-Axis, X-Y nano-motion sensing .
- Extraordinary
repeatability in real working environments.
- High
speed, Compact size,
- Nano/Micro
Stage application.
- NanoGrid
system can be combined with a second sensor to measure in-plane
rotations of up to 4¡Æ, allowing the straightforward measurement
of yaw as well as X and Y.
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| The
OPTRA NanoGrid is an XY metrology system that measures the position of
the sensor head relative to an encoder grid with resolution and
repeatability up to the nanometer level(20 ~0.305nm). Unlike
laser interferometers, the NanoGrid is insensitive to air
turbulence, and is able to provide extraordinary repeatability
in real working environments.
The
NanoGrid Planar Encoder allows both X and Y position measurements to
be made at a single point, using a single laser diode sensing beam.
The relatively large physical separation between the sensor head and
the encoder simplifies installation.
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Spec Sheet: NanoGrid
A |
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 The
NanoGrid A(20nm~0.305nm Resolution) Hi-Resolution
system features the coupling of the NanoGrid XY position
sensor with OPTRA¡¯s Hi Resolution phase processor and signal
interpolation board. This
ISA bus-based processor features fast dual-axis on-board
processing of the encoder position signals.
Position information is available on both the bus
interface for easy software access, or via two 60-pin headers
for direct, high speed data reads at .305nm resolution.
The position data is available in a standard 32-bit
parallel word format. An
optional daughter board is available for signal conversion to
an A-quad-B digital signal format.
A
NanoGrid system captures the accuracy of the laser
interferometer in the manufacturing the grid plate. The sensor
head then collects first-order diffracted light reflected from
the grid. Our patented detector measures the interference
pattern, and results in an extremely stable, balanced signal
with a interpolation error of less then 10 nanometers. (See Theory
of NanoGrid Operation-will open in Adobe
Acrobat)
Due
to its relative insensitivity to yaw rotations, the NanoGrid
system can be combined with a second sensor to measure
in-plane rotations up to 4¡Æ, which provides a system for
directly and simultaneously measuring all possible in-plane
motions. |
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| DownLoad
Spec Sheet: NanoGrid
B
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 The
NanoGrid B(156nm ~20nm Resolution) Standard
Resolution System features the coupling of the NanoGrid XY
position sensor with OPTRA¡¯s PolorFlash signal
processor module. The
ASIC-based processor module features fast dual-axis processing
of the encoder position signals.
Position information is in the form of an industry
standard A-quad-B digital signal.
The edge rate and resolution are selectable,
ranging from 1.25MHz to 10 MHz and from 20nm to 156nm,
respectively.
A
NanoGrid system captures the accuracy of the laser
interferometer in the manufacturing the grid plate. The sensor
head then collects first-order diffracted light reflected from
the grid. Our patented detector measures the interference
pattern, and results in an extremely stable, balanced signal
with a interpolation error of less then 10 nanometers. (See Theory
of NanoGrid Operation -will open in Adobe
Acrobat)
Due
to its relative insensitivity to yaw rotations, the NanoGrid
system can be combined with a second sensor to measure
in-plane rotations of up to 4¡Æ, allowing the straightforward
measurement of yaw as well as X and Y.
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At
OPTRA we realize that at times, an off-the-shelf product may
not fit your exact application.
Since customer satisfaction is our number-one priority,
we can offer customized solutions for all of our sensors and
encoders.
 Examples
of what we offer:
- Custom
cutting – scales and grids cut to non-rectangular
shapes to ideally fit application or mounting scheme
- Software
support – custom software development for your
metrology and calibration application.
- Mounts-
design and manufacture custom mounting hardware for unique
machine fit.
- Vacuum
Preparation – sensors prepared for a vacuum
environment to 10-6 torr.
- Alternate
encoder substrates – materials from INVAR, thin
flexible glass, films, or fabricated onto a machine
component.
- Cabling
Interfaces – sensors fitted with a variety of
termination options.
Contact Us
We can help!
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