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XY25XS
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XY200M
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| | Piezo Actuator | -> | Cedrat Technologies | Piezo Mechanik | |
Piezoelectric XY Stages
The piezoelectric stage XY200M can precisely position a load of up to 3kg on an area of 200x200μm2. This stage is well suited to applications in microscopes (atomic force and scanning tunneling), for positioning of masks (lithography), and scanning applications. The XY200M, which is based on two pairs of APA200M actuators, exhibits a high stiffness. This stage can be equipped with strain gauges or capacitive displacement sensors to obtain a positioning accuracy of up to 10nm. Parasitic rotations about the X, Y, and Z axes, are extremely small.
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XY25XS
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XY200M
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Piezoelectric XYZ Stages
XYZ stages are obtained by adding an actuator (APA or PPA) to an XY stage in order to control motion in the Z direction.
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