Vacuum Robotics and Stages

ALIO Industries parallel and serial kinematic robots and stages offer nanometer resolution under a wide range of vacuum levels and temperatures. All precision bearings, surface finishes and motors are vacuum compatible. Stages are modular and can be stacked for any multi-axis application. Products have two levels of vacuum capability 10e-7 Torr and 10e-10 Torr. Maximum operating temperature of 100 degrees C and maximum bake out of 135 degrees C.

Linear Stages Specifications

Stroke

12 mm to 400 mm

Force

3.5 N to 70.4 N

Resolution

5 nm,10 nm,20nm,50nm,100nm,500nm, 1 micron, and 5 micron

Repeatability

2 to 3 times resolution depending on motion parameters

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Rotary Stages Specifications

Angular Stroke

360 degree or less depending on customer requirements

Repeatability

2 to 3 times resolution depending on motion parameters

Accuracy

1 arc sec to 5 arc sec

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Hexapod and Tripod

Work Envelope

10 mm cube to 100 mm cube

Resolution

5 nm

Repeatability

50 nm at tool center point

　

Click here to download the Vacuum Robotics and Stages brochure.