Nanometer Resolution Linear and Rotary Stages ALIO Industries linear and theta stages with nanometer repeatability's are available from our standard product offering or designed for custom solutions utilizing our core technology. These products can be interfaced to customer controllers or ordered with motion controllers and hardware. Stages are available for end user and OEM applications in atmospheric, clean room and vacuum environments requiring extremely precise movement with over 40,000 hour MTBF.

　

Linear Stages.. Stroke.... Force.... Dimensions AI-1200 12 mm 4.4 N 40/40/34 mm AI-2400 24 mm 4.4 N 80/80/34 mm AI-5000 50 mm 8.8 N 106/80/34 mm AI-10000 100 mm 17.6 N 150/100/40 mm AI-15000 150 mm 17.6 N 260/100/40 mm AI-20000 200 mm 17.6 N 320/100/40 mm AI-30000 300 mm 35.2 N 456/155/50 mm AI-40000 400 mm 35.2 N 456/155/50 mm

　

External Motor Stages... Stroke... Force... Dimensions AI-2500E 25 mm 8.8 N 88/114/30 mm AI-HR4-2500E 25 mm 17.6 N 88/114/30 mm AI-D-HR4-2500E 25 mm 35.2 N 88/140/30 mm AI-D-HR8-2500E 25 mm 70.4 N 88/140/30 mm AI-HR4-5000E 50 mm 8.8 N 100/114/30 mm AI-D-HR4-5000E 50 mm 17.6 N 100/114/30 mm AI-HR8-5000E 50 mm 35.2 N 100/114/30 mm AI-D-HR8-5000E 50 mm 70.4 N 100/114/40 mm AI-HR4-10000E 100 mm 17.6 N 100/114/40 mm AI-D-HR4-10000E 100 mm 35.2 N 155/114/30 mm AI-HR8-10000E 100 mm 35.2 N 155/114/30 mm AI-D-HR8-10000E 100 mm 70.4 N 155/114/40 mm AI-HR4-20000E 200 mm 17.6 N 155/114/40 mm AI-D-HR4-20000E 200 mm 35.2 N 330/114/30 mm AI-HR8-20000E 200 mm 35.2 N 330/114/30 mm AI-D-HR8-20000E 200 mm 70.4 N 330/114/40 mm AI-D-HR4-30000E 300 mm 35.2 N 485/125/40 mm AI-HR8-30000E 300 mm 35.2 N 485/125/50 mm AI-D-HR8-30000E 300 mm 70.4 N 485/125/50 mm AI-D-HR4-40000E 400 mm 35.2 N 610/130/50 mm AI-HR8-40000E 400 mm 35.2 N 610/130/60 mm AI-D-HR8-40000E 400 mm 70.4 N 610/130/60 mm

　

All linear stages have 8 resolution choices depending on application needs. Linear stage precision choices Encoder Interpolated Resolution Repeatability Velocity 5 nm motion controller 10 nm 150 mm/ second 10 nm Renishaw 20 nm 80 mm/ second 20 nm Renishaw 40 nm 110 mm/ second 50 nm Renishaw 100 nm 250 mm/ second 100 nm Renishaw 200 nm 250 mm/ second 500 nm Renishaw 1 micron 250 mm/ second 1 micron Renishaw 2 micron 250 mm/ second 5 micron Renishaw 10 micron 250 mm/ second

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Theta Stages Rotation.... Resolution.... Velocity.... Dimensions AI-80R 360 degrees 0.06 arc sec 360 deg/sec 100 dia. / 28 ht. mm AI-105R 360 degrees 0.08 arc sec 180 deg/sec 105 dia. / 38 ht. mm AI-133R 360 degrees 0.06 arc sec 360 deg/sec 133 dia. / 60 ht. mm AI-200R 360 degrees 0.06 arc sec 360 deg/sec 200 dia. / 60 ht. mm AI-105G 360/180 deg. 0.08 arc sec 180 deg/sec 133 dia. / 157 ht. mm AI-133G 360/180 deg. 0.08 arc sec 180 deg/sec 133 dia. / 183 ht. mm AI-200G 360/180 deg. 0.06 arc sec 180 deg/sec 200 dia. / 200 ht. mm Theta Stages resolutions are based on 10 nm resolution encoder interpolations.

　

Click here to download the Linear Stage brochure. Click here to download the Theta Stage brochure.