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Parallel Kinematic Robotics Stage System

   ALIO Industries (patented) parallel kinematic 3 axis and 6 axis robotic systems promise to revolutionize the manufacturing processes of products requiring nanometer resolution and repeatability.
   With 5 nanometer resolution revolving around a virtual point in space coupled with speeds of up to 200 mm/sec these robotic products form the basis of the next generation of automated nano-positioning systems for the most demanding applications in photonics, packaging, test, micro machining, defense systems, measurement, medical and semiconductor manufacturing.
Mini-Hexapod Hexapod
Nanometer Resolution Linear and Rotary Stages
   ALIO Industries engineers and manufacturers nano resolution linear and rotary stages for stand alone motion or stackable in various serial kinematic structures. The standard stages can be modified or reengineered to meet customer needs plus these products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software. Stages are available for end-user and OEM applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.
Linear Stages External Motor Stage
Vacuum Robotics and Stages
  ALIO Industries parallel and serial kinematic products offer nanometer resolution under a wide range of vacuum levels and temperatures. All precision bearings, surface finishes, encoders and motors are vacuum compatible.  Stages are modular and can be stacked for any multi-axis application. Products have two levels of vacuum capability 10e-7 Torr and 10e-10 Torr. Maximum operating temperature of 100 degrees C and maximum bake out of 135 degrees C.

Vaccum Stage

  Vaccum Parallel Robotic   Stage

Manual Linear and Theta Stages
ALIO Industries same high quality precision stages are also available with manual micrometers for low cost product and process development. These stages were specifically designed to enhance the development and manufacturing of advanced Photonics assemblies or applications where precision alignments are necessary.

Manual Linear & Theta Stages