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| The SB214PC Motion Controller | ||
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| Application | ||
| Application:
Semiconductor Wafer Inspection PC Motion Controller Offers Board-Level Solution for Semiconductor Wafer Inspection System Nova
Measuring Instruments of Rechovot, Israel, approached. ACS-Tech80
for assistance in developing a control system for their integrated
monitoring system used during the chemical-mechanical polishing (CMP)
process.
Using a nonlinear control technique, our SB214PC motion controller provided the NovaScan 210¡¯s optical measuring head with the needed accuracy and speed. |
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